ST, A*STAR, and ULVAC cooperate to promote the application of piezoelectric MEMS technology

Semiconductor supplier and world leader in MEMS (micro-electromechanical systems) technology STMicroelectronics (ST; NYSE: STM) recently announced that it has partnered with A*STAR IME Research Institute in Singapore and ULVAC, a leading Japanese manufacturing tool supplier, to jointly establish an 8-inch (200mm) wafer R&D production line in ST's Singapore wafer fab, focusing on piezoelectric MEMS technology. This world-first "Lab-in-Fab" R&D production line integrates the three partners' leading technologies and complementary R&D capabilities in the fields of piezoelectric materials, piezoelectric MEMS technology, and wafer manufacturing tools, promoting the innovative development of new materials and process technologies, and ultimately accelerating product development for corporate customers.

The Lab-in-Fab laboratory includes a new cleanroom area in STMicroelectronics' Ang Mo Kio Industrial Park, which will be equipped with tools and dedicated resources provided by the three partners to provide a workplace for MEMS R&D process scientists and engineers. IME Microelectronics' knowledge base and industrial drive in piezoelectric MEMS device design, process integration and system integration will provide a positive value-added role in the development of the R&D production line. IME will also provide state-of-the-art tools and equipment to ensure that the results of scientific and technological innovations are smoothly transformed into products, and all processes are completed in the same location. The new R&D production line will also leverage STMicroelectronics' existing resources and take advantage of the economies of scale of ST's wafer fab in the same park. It is expected that the "Lab-in-Fab" facility will be completed and put into use in the second quarter of 2021 and produce the first batch of wafers, and mass production will be achieved by the end of 2022.

"We already have a long history of collaboration with IME and ULVAC, and this new collaboration aims to jointly establish a world-leading center for the development of piezoelectric MEMS materials, technologies, and products," said Benedetto Vigna, President of STMicroelectronics' Analog, MEMS, and Sensors (AMS) Division. "This first-of-its-kind lab will be located in ST's strategically located Singapore facility. The Lab-in-Fab will enable our customers to easily transition from concept feasibility studies to mass production."

The collaboration will enhance ST Singapore’s existing manufacturing process portfolio and accelerate the adoption of piezoelectric MEMS actuators in promising new applications, including MEMS mirrors for smart glasses, AR headsets, and LiDAR systems; piezoelectric micromachined ultrasonic transducers (PMUTs) for emerging medical devices, and piezoelectric print heads for commercial and industrial 3D printers.

Professor Dim-Lee Kwong, Executive Dean of IME, said: “This public-private partnership between IME, ST and ULVAC has established a unique R&D pipeline that will develop innovative products using piezoelectric materials and enhance the competitiveness of the partners. These efforts will continue to anchor high-value R&D activities in Singapore and demonstrate that Singapore remains the preferred location for industry leaders to conduct technological innovation and grow their businesses. A*STAR is committed to helping local SMEs develop and leverage our technologies. We welcome companies to collaborate with IME and use our Lab-in-Fab facilities for proof of concept.”

Dr. Koukou SUU, Executive Officer and Senior Researcher at ULVAC , said: "We are delighted to be the 'Lab-in-Fab' partner of ST and IME to develop advanced Piezo MEMS products for many promising future applications. This fully demonstrates ULVAC's leading position in the market for Piezo MEMS manufacturing technology solutions. We look forward to working closely with our partners to make this collaboration a complete success."