MEMS Technology Basics

The goal of MEMS technology is to explore components and systems with new principles and functions through the miniaturization and integration of the system. MEMS technology is a typical multidisciplinary frontier research field, involving almost all fields of natural and engineering sciences, such as electronic technology, mechanical technology, physics, chemistry, biomedicine, material science, energy science, etc. Its research content can generally be summarized into the following three basic aspects:

1. MEMS theoretical basis:

At the scale that current MEMS can reach, the basic physical laws of the macroscopic world still work, but due to the impact of scaling, many physical phenomena are very different from the macroscopic world, so many original theoretical foundations will change, such as the size effect of force, the surface effect of microstructure, micro friction mechanism, etc. Therefore, it is necessary to conduct in-depth research on microdynamics, microfluid mechanics, microthermodynamics, microtribology, microoptics and microstructure. Although this aspect of research is valued, it is difficult and often requires scholars from multiple disciplines to conduct basic research.

2. MEMS technology foundation:

The technical basis of MEMS can be divided into the following aspects: (1) design and simulation technology; (2) material and processing technology; (3) packaging and assembly technology; (4) measurement and testing technology; (5) integration and system technology, etc.

3. MEMS application research:

People not only need to develop various technologies for manufacturing MEMS, but more importantly, how to combine MEMS technology with application fields such as aerospace, information and communication, biochemistry, medical, automatic control, consumer electronics and weapons to produce MEMS devices and systems such as microsensors, microactuators, microstructures, etc. that meet the requirements of various fields.