A team led by Professor Lu Hongliang from the School of Microelectronics at Fudan University has for the first time combined the hard template method, atomic layer deposition technology and hydrothermal process to in situ synthesize a multi-level heterogeneous composite nanomaterial of a single-layer ordered SnO2 nanobowl-branched ZnO nanowire on a low-power MEMS device, and used it as a gas sensor to achieve ultra-sensitive and highly selective detection of hydrogen sulfide at concentrations as low as 1 ppm.
Image source: Fudan University
It is reported that the common sensor preparation technology at present is to print or drip nanosensing materials onto ceramic tubes or MEMS devices, which greatly limits the reliability and repeatability of the sensor. Therefore, a preparation technology that can seamlessly integrate nanosensing materials and MEMS micro-heating substrates is crucial for the development of high-performance gas sensors with high stability and low power consumption.
This time, the MEMS-type single-layer ordered SnO2 nanobowl branched ZnO nanowire device designed by the researchers has a response (Ra/Rg) of up to 6.24 to 1ppm hydrogen sulfide at an operating temperature of 250oC. Its response change rate (5.24) is about 2.6 times that of the single-layer ordered SnO2 nanobowl device, and it also has a faster response/recovery speed.
At the same time, the study also proved that the MEMS-type single-layer ordered SnO2 nanobowl branched ZnO nanowire device has good long-term stability and repeatability. The multi-level heterostructure not only effectively increases the specific surface area of the material and improves the gas adsorption capacity of the material, but also the heterojunction improves the gas-sensitive response ability of the material.
It is understood that the sensing materials of the research team are prepared in situ on MEMS devices, and also have the advantages of low power consumption and integration, providing technical support for the development of high-sensitivity and high-stability gas sensors in the field of gas monitoring.
At present, relevant results have been published in the top international journal Microsystems & Nanoengineering, which is jointly published by the Institute of Electronics of the Chinese Academy of Sciences and the former Nature Publishing Group. It is the first engineering journal jointly published by the former Nature Publishing Group.
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