Sensors based on surface acoustic waves have high sensitivity and good linearity, and are expected to be widely used in gas sensors. Usually, the measurement circuit is composed of an amplifier and a SAW device to form a SAW oscillator. The disturbance on the surface of the SAW device, such as the deposition of gas molecules on the sensor surface, causes the oscillation frequency of the SAW oscillator to change. The desired physical quantity can be obtained by measuring the change in frequency.
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