Photoresist giant JSR Korea EUV MOR photoresist production base started construction, expected to be put into production in 2026

On November 12, according to a press release on the official website of the South Korean Ministry of Trade, Industry and Energy, Japan's JSR, a semiconductor photoresist giant, held a groundbreaking ceremony for a MOR (IT Home Note: Metal Oxide) photoresist production base in Cheongju, North Chungcheong Province, South Korea today.

The production base, built by JSR Micro Korea, a subsidiary of JSR in South Korea, will produce MOR photoresists that can be used for EUV lithography, with the goal of being completed and put into production in 2026. This is also the first photoresist factory of its kind in South Korea.

MOR photoresist suitable for EUV process can replace low-end chemical amplification photoresist and play a key role in ensuring the competitiveness of ultra-fine processes. JSR Micro Korea's new plant is expected to directly supply Samsung Electronics and SK Hynix, two major semiconductor manufacturing giants in South Korea, to ensure a stable and reliable supply of photoresist.

In a related press release on August 30 this year, JSR also mentioned that the company plans to build a new MOR R&D base in the Kanto region of Japan starting this fall to supplement the existing precision electronics development center in Yokkaichi, Mie Prefecture, Japan, in order to strengthen exchanges and cooperation with global customers and partners.