Institute of Microelectronics, Chinese Academy of Sciences: Research team directly supports mass production of 0.18 nanometer chips

According to the Institute of Microelectronics of the Chinese Academy of Sciences, the team led by researcher Wei Yayi of the institute has helped Jita Semiconductor complete five rounds of OPC work and successfully tape out wafers, directly supporting Jita Semiconductor's mass production process research and development at the 0.18-nanometer technology node, while helping Jita Semiconductor establish an OPC research and development team.

In 2018-2019, Researcher Wei Yayi of the Institute of Microelectronics led the team of the Computational Lithography R&D Center of the Leading Center to carry out in-depth cooperation with Shanghai Jetta Semiconductor Co., Ltd. on optical proximity effect correction in advanced lithography manufacturing of integrated circuits.

During the cooperation, Wei Yayi's team and Shanghai Jetta Semiconductor carried out light source optimization, OPC modeling, layout optimization and silicon verification based on the process and product characteristics for the optical proximity correction problems faced in actual production.

This cooperation is the second time that the Wei Yayi team of Microelectronics has provided guidance to actual manufacturing industry enterprises after cooperating with domestic integrated circuit manufacturing companies such as SMIC and Yangtze Memory Technologies, helping them to establish a correction process for the optical proximity effect and help them break through key technologies to achieve mass production.

The Shanghai Jetta Semiconductor Project is located in the Lingang Heavy Equipment Industrial Zone, with a total investment of 35.9 billion yuan. It is an important part of the cooperation agreement between the Shanghai Municipal Government and China Electronics Information Industry Group, and is also the first major industrial project to be implemented. The project goal is to build an 8-inch production line with a monthly production capacity of 60,000 pieces and a 12-inch special process production line with a monthly production capacity of 50,000 pieces. It will create a special process production line for high-end applications such as industrial control and automotive electronics.