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Microelectromechanical system technology Tamkang University open course
Chapters
Chapter 1：Introduction to MEMS Technology (1 hours and 10 minutes and 19 seconds)
Chapter 2：Semiconductor Process and Equipment (1 hours and 51 minutes and 32 seconds)
Chapter 3：Silicon Micromachining 1 (1 hours and 21 minutes and 39 seconds)
Chapter 4：Silicon Micromachining 2 (50 minutes and 57 seconds)
Chapter 5：Metal oxide semi-microelectromechanical technology (1 hours and 7 minutes and 29 seconds)
Chapter 6：High aspect ratio micromachining technology (1 hours and 30 minutes and 24 seconds)
Chapter 7：Polymer MEMS Technology 1 (1 hours and 7 minutes and 20 seconds)
Chapter 8：Polymer MEMS Technology 2 (38 minutes and 8 seconds)
Chapter 9：Microsensor Technology 1 (49 minutes and 4 seconds)
Chapter 10：Microsensor Technology 2 (52 minutes and 4 seconds)
Chapter 11：microactuator technology (49 minutes and 35 seconds)
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