TSMC: Will introduce ASML's next-generation extreme ultraviolet lithography machine in 2024

Publisher:快乐时刻Latest update time:2022-06-17 Source: 新浪科技Keywords:TSMC  ASML Reading articles on mobile phones Scan QR code
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Beijing time, June 17th morning news, TSMC executives said on Thursday that TSMC will obtain the next generation of more advanced chip manufacturing tools from ASML of the Netherlands in 2024.

  

The new High-NA EUV lithography machine is used to make more advanced, tiny integrated circuits on computer chips in devices such as mobile phones, laptops, cars and smart speakers. EUV is short for "extreme ultraviolet," which is the wavelength of light that ASML's lithography machines use.

  

"TSMC will introduce high numerical aperture EUV lithography machines in 2024 to develop related infrastructure and exposure solutions required by customers and continue to advance innovation," said Yujie Mi, senior vice president of R&D at TSMC, at a TSMC technology seminar in Silicon Valley.


The high numerical aperture EUV lithography machine is a second-generation EUV lithography tool that can be used to make smaller and faster chips. Mi Yujie did not disclose when TSMC plans to use the equipment for chip mass production. Previously, TSMC's competitor Intel said it would be the first company to introduce the equipment and use it for mass production before 2025.

  

Intel is moving into the chip foundry business, where it will compete with TSMC for chip design company customers.

  

Kevin Zhang, TSMC's senior vice president of business development, said that TSMC will not be ready to use the new lithography machine until 2024, and the new lithography machine will be mainly used for research with partners.

  

"TSMC having new lithography machines by 2024 means they will get the most advanced technology faster," said Dan Hutcheson, a chip economist at TechInsights who attended the seminar. "High numerical aperture EUV is the next important technological innovation and will ensure TSMC's chip technology is at the forefront."

  

On Thursday, TSMC also announced more details of its 2-nanometer chip technology. The company said such chips will still go into mass production in 2025 as planned. In addition, TSMC said it has spent 15 years researching so-called "nanosheet" transistor technology to improve chip speed and energy efficiency, and will use this technology for the first time in 2-nanometer chips.


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