Introduction The FSG series of small-flow gas mass flow sensors are specially designed for the measurement and process control of various types of small-flow gases. This series of sensors are all made of the micro-electromechanical system (MEMS) flow sensor chip independently developed by our company and are suitable for all types of clean gases. The unique packaging technology makes it applicable to various pipe diameters, with low cost, easy installation, and no need for temperature and pressure compensation. It can replace traditional volumetric or differential pressure flow meters and is equipped with a variety of signal outputs. The communication interface can realize network management functions. Product features: The sensor has high sensitivity and a very small starting flow. The sensor chip adopts thermal mass flow measurement, without the need for temperature and pressure compensation, which ensures the high-precision measurement of the sensor. Multiple sensors are integrated on a single chip, which greatly improves the range ratio of the sensor; the sensor has high zero point stability, high stability over the full range, high accuracy and excellent repeatability over the full range, low power consumption, low pressure loss, and fast response time.
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