The first 12-inch advanced sensor pilot line in China was successfully put into operation

The National Intelligent Sensor Innovation Center announced that on June 30, the country's first 12-inch advanced sensor pilot line built by the National Intelligent Sensor Innovation Center (referred to as the "Innovation Center") was successfully put into operation.

The pilot line is mainly equipped with domestic equipment, and has core process capabilities for advanced sensors and wafer-level 3D integration technologies such as wafer bonding, wafer thinning, dry and wet etching, physical and chemical vapor deposition, atomic layer deposition, chemical mechanical polishing, wet cleaning, and automated measurement. At the same time, it provides a verification platform for domestic equipment, accelerates the localization of the advanced sensor industry chain, and achieves independent control.

The Innovation Center will continue to develop key common technologies such as new materials, new processes, new devices and new integration on the 12-inch pilot line, focusing on breakthroughs in the core processes of advanced sensors such as optics, acoustics, mechanics, and biology, and promoting the industrialization of related products and applications.

The 12-inch pilot line is located in the Shanghai Intelligent Sensor Industrial Park. The industrial park takes intelligent sensors as its core and is supported by innovative platforms and leading enterprises. It strives to build Shanghai Jiading into an industrial highland in the domestic sensor field.