The first domestic precision vertical counter CNC grinding machine with a diameter of more than 700mm was successfully developed

Publisher:烟雨江湖Latest update time:2021-05-26 Source: 爱集微 Reading articles on mobile phones Scan QR code
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Beijing Boruspan Precision Machine Tool Co., Ltd. (hereinafter referred to as "Boruspan") has successfully developed the first domestic ultra-precision vertical counter CNC grinder with a diameter of 700mm.


According to Hangshi Asset Management, the ULTR-700VG ultra-precision grinder for lithography objective systems developed by Boruspan in cooperation with Dr. Yang Huaijiang's team at the Changchun Institute of Optics, Fine Mechanics and Physics of the Chinese Academy of Sciences passed the inspection of the National Machine Tool Quality Supervision and Inspection Center in May this year. The grinder has an accuracy of 0.1~0.2μm, optimizes environmental interference, and can be stabilized to 0.1μm.

According to Red Horse Capital, this machine tool is mainly used for batch processing of ultra-precision optical devices, including the core objective system of lithography machines. It is of great significance for my country's upstream chip industry to break through foreign blockades and is one of the key equipment to solve the "bottleneck" problem.

It is reported that Boruspan was established in 2006 and is mainly engaged in the research, development, design, manufacturing and sales of high-end equipment such as precision/ultra-precision CNC machine tools, ultra-precision nano-optical machine tools required for computer chip manufacturing, and precision and ultra-precision testing equipment.


Reference address:The first domestic precision vertical counter CNC grinding machine with a diameter of more than 700mm was successfully developed

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