Canon launches FPD exposure equipment MPAsp-E1003H, which can be used to produce large special displays for vehicles and smartphone displays

On May 28, Canon China officially announced that it will release a new FPD exposure equipment MPAsp-E1003H that supports the use of 6th generation glass substrates in early June 2024.

▲ MPAsp-E1003H

IT Home Note: FPD stands for flat panel display. Common products can generally be divided into different types such as LCD, OLED, LED, PDP, ELD, FED, and projection display.

▲ Large special display on board (schematic diagram)

Canon said that this product uses a projection optical system that can achieve a high resolution of 1.5μm (L/S), and the exposure range of a single exposure is expanded by about 1.2 times, which will further enhance production capacity.

It is reported that this projection optical system was used in "MPAsp-H1003H", which can be used to produce 65-inch panels for large TVs, etc. using a one-time exposure of the 8th generation glass substrate.

On a glass substrate, if you produce products such as smartphone panels, you previously needed 6-shot exposure, but the new product only needs 4-shot exposure, which greatly improves production performance. In addition, when producing large horizontal special displays for vehicles, seamless 2-shot exposure can also be achieved. In addition, the driving speed of the glass substrate mounting platform has increased by about 60%, and the tact time has increased by about 14%, effectively improving mass production efficiency.

Canon said that in addition to using the same multi-point simultaneous measurement alignment method for each panel as the "MPAsp-E813H" that supports the 6th generation glass substrate (which not only ensures production efficiency but also achieves high-precision exposure), the new product is also equipped with a newly developed non-linear correction REI (Real-Time Equalizing distorted Image) module, which enables it to achieve a high overlay accuracy of ±0.30μm even if the exposure range is expanded.

In addition, the new product uses the illumination mode switching mechanism that was previously installed on the "MPAsp-H1003H" to achieve super-resolution technology. The illumination mode can be switched according to the type of exposure pattern required, thereby adapting to the exposure of various manufacturing processes.

This new product is equipped with an automatic exposure slit adjustment mechanism (SIC: Slit Illuminance Control) in the mechanism that forms arc light. By automatically controlling the width of the slit through which light passes, the intensity distribution of the exposure light can be changed, thereby achieving a stable exposure line width.

At the same time, the new product also uses a universe chuck that can freely select the vertical and horizontal directions of the glass substrate according to the exposure layout, which is the first time that it can meet the diverse layout requirements of vehicle-mounted displays. Canon said that by strengthening the process response capabilities of the above manufacturing processes, the MPAsp-E1003H has more stable manufacturing quality.