Semiconductor Science | Semiconductor Manufacturing Process - Challenges and Opportunities
Summary
Semiconductor component manufacturing involves a series of complex fabrication processes that transform raw materials into finished components for applications that provide a variety of critical control and sensing functions.
Andreas Bier
Sr Principal Product Marketing Specialist
Semiconductor manufacturing involves a complex series of processes that transform raw materials into final, finished components. The process typically consists of four main stages: wafer fabrication, wafer test assembly or packaging, and final testing. Each stage has its unique challenges and opportunities. Its manufacturing process also faces many challenges including cost, complexity, diversity and throughput, but it also brings huge opportunities for innovation and development. By coping with the difficulties and seizing the opportunities, we promote the development of new technologies to change the way we live and work, while enabling the industry to continue to develop and grow.
Semiconductor Manufacturing Process Overview
▲ The main processes of semiconductor wafer manufacturing: 1) wafer preparation 2) pattern transfer 3) material doping 4) deposition 5) etching 6) packaging
The process of manufacturing semiconductors can be divided into the following key steps.
Step One: Wafer Preparation
Silicon wafers are chosen as the starting material for semiconductor processes. The wafers are cleaned, polished, and prepared for use as substrates for manufacturing electronic components.
Step 2: Patterning
In this process, patterns are created on silicon wafers using a process called photolithography. A layer of corrosion-resistant photoresist is applied to the wafer surface, and a mask is placed on top of the wafer. The mask has corresponding patterns of related prefabricated electronic components. UV light is then used to transfer the pattern from the mask to the photoresist layer. The exposed areas of photoresist are then removed, ultimately leaving a patterned surface on the wafer.
Step Three: Material Doping
In this step, materials are added to the silicon wafer to change its electrical properties. The most commonly used materials are boron or phosphorus, which can be added in small amounts to produce p-type or n-type semiconductors respectively. These materials are made through a process called ion implantation, which uses ion acceleration to inject accelerated ions onto the surface of the wafer.
Step 4: Wafer deposition processing
In this manufacturing process, thin films of material are deposited onto wafers to create electronic components. This can be achieved through a variety of techniques, including chemical vapor deposition (CVD), physical vapor deposition (PVD), and atomic layer deposition (ALD). These processes can be used to deposit materials such as metals, oxides, and nitrides.
Step 5: Etching
The removal of portions of material from the surface of a wafer to create the shapes and structures required for electronic components. Etching can be performed using a variety of techniques, including wet etching, dry etching, and plasma etching. These processes use chemicals or plasma to selectively remove specific materials from the wafer.
The last step: packaging
Electronic components are packaged into final products that can be used in electronic devices. This involves connecting components to a substrate such as a printed circuit board and then connecting them to other components using wires or other means. Semiconductor processes are very complex and involve a variety of specialized equipment and materials. These processes are essential to the manufacture of modern electronic devices and continue to evolve as new technologies are iterated.
Typically, the process of producing semiconductor chips takes weeks to months. Starting from the first stage, a silicon wafer needs to be manufactured to serve as the substrate for the chip. This process usually includes the following processes, cleaning, deposition, photolithography, etching and doping. Wafers may need to undergo hundreds of different processes, so the entire wafer manufacturing process may take up to 16 to 18 weeks.
When individual individual chips are manufactured on a wafer, they need to be separated and packaged into independent units. This includes testing each chip to ensure it meets specifications, then detaching it from the wafer and mounting it onto a package or substrate. After chips are packaged, they go through a rigorous testing process to ensure they meet quality standards and function as expected. This includes running electronic tests, functional tests, and other types of verification tests to identify any defects or issues. This also depends on the complexity of the chip and the testing requirements required, so this packaging and testing process may take 8-10 weeks.
All in all, the entire process of producing a semiconductor chip can take weeks or months, depending on the technology used and the complexity of the chip's design.
▲ Steps and overview of the main processes in semiconductor device manufacturing: 1) p-type substrate wafer 2) thermal oxidation 3) photolithography 4) oxide etching 5) n+ ion implantation 6) thermal oxidation 7) gate photolithography 8) gate Oxide etching 9) Metal deposition 10) Metal contact lithography 11) Metal etching 12) Styling components
Semiconductor Manufacturing Trends and Challenges
pattern transfer
Advances in pattern transfer technology have become a key driver of the rapid growth of the semiconductor industry, enabling the fabrication of smaller and more complex electronic components. A major advancement in pattern transfer technology has been the development of advanced photolithography techniques. Lithography is the process of using light or other radiation sources to transfer patterns onto a media surface. In particular, lithography technologies developed in recent years, such as extreme ultraviolet (EUV) lithography and multiple patterning technologies, are used to produce smaller and more complex patterns. EUV lithography uses extremely short-wavelength light beams to create extremely precise patterns on silicon wafers. This technology is capable of creating dimensions down to a few nanometers, which is critical for making advanced electronic components such as microprocessors. Multi-patterning is another photolithography technique that enables the creation of smaller patterns. This technique involves breaking up a single pattern into patterns of multiple microelectrodes, which are then transferred to the wafer surface. This allows the creation of patterns smaller than the wavelength of radiation used in photolithography.
Dopant
Dopants add specific dielectrics to silicon wafers to change their electrical properties. The advancement of dopant technology has always been a key factor in the rapid development of the semiconductor industry. The advancement of this technology is due to the emergence of new dielectric materials. Traditionally, boron and phosphorus have been the most commonly used dopant materials because they produce p-type and n-type semiconductors, respectively. In recent years, however, new materials such as germanium, arsenic and antimony have been developed and can be used to create more complex electronic components. Another advancement in doping technology is the advancement of more precise doping processes. In the past, ion implantation was the main technology used for dopants, involving the use of high-speed ions to inject dielectrics into the surface of the wafer. Although ion implantation is still commonly used, new technologies such as molecular beam epitaxy (MBE) and chemical vapor deposition (CVD) have been developed to allow more precise control of the doping process.
deposition
Deposition is another key process in semiconductor manufacturing and involves depositing thin films of material onto a substrate. This process can be achieved through various technologies, such as physical vapor deposition (PVD), chemical vapor deposition (CVD), atomic layer deposition (ALD), etc. At the same time, new technologies are also constantly developing, including metal organic chemical vapor deposition (MOCVD), plasma enhanced deposition, roll-to-roll deposition, etc.
etching
Etching involves removing specific portions of semiconductor material to create patterns or structures. Advances in etching technology are the main reason for the rapid development of the semiconductor industry and are also a key technology for manufacturing smaller and more complex electronic components. In the past, wet etching was the dominant technique in common use, involving immersing the wafer in a solution that dissolves the material. However, wet etching is not precise and can cause damage to adjacent structures. The emergence of dry etching technology has enabled more precise and highly controllable etching production, such as reactive ion etching (RIE) and plasma etching. RIE is a technique that uses reactive ions to selectively remove material from a wafer, allowing precise control of the etching process. Plasma etching is a similar technique that uses a gas plasma to remove material, but it has the added benefit of selectively removing specific materials, such as metal or silicon.
encapsulation
The packaging process in semiconductor manufacturing involves encapsulating integrated circuits in a protective housing that also provides electrical connections to the outside world. The packaging process affects the performance, reliability and cost of the final product. 3D packaging involves stacking multiple chips together to create high-density integrated circuits. This technology can reduce the overall size of the device and improve its performance while also reducing power consumption. Fan-out packaging is a technology in which integrated circuits are embedded in a layer of epoxy molding compound, using copper pillars fanned out from the chip to make electrical connections. This technology enables high-density packaging in smaller sizes. System-in-package (SiP) is another technology that integrates multiple chips, sensors and other components into a single package. It can reduce the overall size of the device while improving its overall performance.
Renesas’ support for semiconductor processes
role and progress
Renesas Electronics is recognized as a preeminent supplier of advanced semiconductor solutions, providing microcontrollers , analog and power components, and system-on-chip (SoC) solutions for a wide range of applications including automotive, industrial and IoT . We are committed to innovation and play a pivotal role in supporting semiconductor processes by developing advanced technologies.
Renesas has made major breakthroughs in the development of advanced computing products, with extremely high expansion and innovation in both digital and analog fields. Our devices and components provide critical control and sensing capabilities required for applications ranging from power management to motor control. At the same time, various innovative technologies are continuously developed, such as silicon carbide (SiC) MOSFET, which has higher efficiency and lower losses than traditional silicon-based components. The company also plays a leading role in the advancement of semiconductor manufacturing processes by developing advanced manufacturing technologies. For example, Renesas has developed a unique process called metal-oxide-nitride-oxide-silicon (MONOS) that enables the manufacture of high-density, high-speed flash memory devices. This process has been used to develop advanced memory solutions for a wide range of applications including automotive and industrial.
In addition to technological advancement, Renesas is committed to supporting the semiconductor industry through partnerships, working closely with other companies or organizations to jointly develop industry standards and best application practices to promote continuous innovation and progress in the semiconductor industry. For more information, you can copy the corresponding link below or click at the end of the article to read the original text to view.
Renesas Application
https://www.renesas.cn/cn/zh/applications
Renesas Microcontrollers and Microprocessors (MCU, MPU)
https://www.renesas.cn/cn/zh/products/microcontrollers-microprocessors
Renesas Analog Products
https://www.renesas.cn/cn/zh/products/analog-products
Renesas Power Management
https://www.renesas.cn/cn/zh/products/power-power-management
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