This instrument is very important in chip manufacturing

Latest update time：2022-06-13 11:21

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Wet electronic chemicals refer to various electronic chemical materials used in the wet process of microelectronics and optoelectronics (mainly including wet etching, cleaning, development, interconnection, etc.). According to their uses, they can be divided into general chemicals (also known as ultra-clean high-purity reagents) and functional chemicals (represented by photoresist supporting reagents).

Among them, the demand for ultra-clean high-purity reagents accounted for 88%, and the proportions were sulfuric acid, hydrogen peroxide, ammonia water, hydrofluoric acid, isopropyl alcohol, nitric acid and phosphoric acid; functional chemicals accounted for 12%, and the proportions were semiconductor developer, etching solution, panel developer, stripping solution and buffered etching solution.

Mettler Toledo Potentiometric titrators are widely used in electronic wet chemicals. The following are some typical applications:

Potentiometric titrator

General Wet Electronic Chemicals

Determination of Hydrogen Peroxide Content by Ceric Sulfate Method

The titration of hydrogen peroxide content usually includes potassium permanganate method and cerium sulfate titration method. Since cerium sulfate is very stable as a titration solution, it can be directly prepared without calibration to obtain a standard solution, which is very convenient to use.

Take 0.1~0.5g hydrogen peroxide, add DI water to the 20mL mark in the conical flask, add 20mL 20% sulfuric acid and titrate with 0.1mol/L cerium sulfate standard solution to the endpoint.

Hydrogen peroxide content results

The potassium permanganate method is used to determine the hydrogen peroxide content. It is simple to operate, fast to detect (3-5 minutes), accurate in the determination result, and the relative standard deviation of the determination repeatability can be controlled within 1%.

Instrument configuration: potentiometric titrator, DMi140-SC redox electrode, DV1010 burette

Other General Chemical Solutions

Functional wet electronic chemicals

Developer-Tetramethylammonium hydroxide determination

Mettler Toledo potentiometric titrator can effectively control the content of tetramethylammonium hydroxide. The method refers to SJ/T11636-2016 Potentiometric titration method for the determination of tetramethylammonium hydroxide in developer for the electronics industry.

Method: Accurately weigh an appropriate amount of sample (accurate to 0.0001g), place it in a titration cup, add 50mL of deionized water, titrate with 0.1N hydrochloric acid titrant, and calculate the tetramethylammonium hydroxide content at the first equivalence point.

The determination results of tetramethylammonium hydroxide using two methods are accurate and reproducible, and the maximum absolute errors are less than 0.01%.

Instrument configuration: potentiometric titrator, DGi111-SC/DGi115-SC acid-base titration electrode, DV1020 burette.

Buffered Etching Solution - Ammonium Fluoride and Hydrofluoric Acid Determination

Buffered etching solution is mainly used to etch the SiO2 oxide film in deep grooves on wafers. When the temperature is constant, the etching rate of the oxide film mainly depends on the ratio of the etching solution and the SiO2 doping. The ratio of the etching solution is determined by a Mettler Toledo potentiometric titrator, and the measurement results are accurate and repeatable.

Accurately weigh an appropriate amount of sample, add 50 ml of water to dilute, and titrate with 0.1 mol/L sodium hydroxide. There are two jumps during the titration process. The first jump is the titration endpoint of HF, and the second jump is the titration endpoint of ammonium fluoride.

The pKa of HF is 3.45, and the pKa of NH4 ⁺ is 9.25, so the first jump is the titration endpoint of HF, and the second jump is the titration endpoint of NH4F. According to the difference in the dissociation equilibrium constants of HF and NH4 ⁺ , the concentrations of HF and NH4F can be determined by one-step titration.

Instrument configuration: potentiometric titrator, DGi111-SC/DGi115-SC acid-base titration electrode, DV1010 burette

Aluminum etching solution - nitric acid, phosphoric acid, acetic acid

Titration of ternary mixed acid content

Method 1 , the main application is aluminum etching liquid raw material monitoring:

Determination of aluminate content (4% HNO3, 75% H3PO4, 10% HAc)

Titrant (0.2 M KOH-2-Isopronal)

Solvent: ethanol: propylene glycol = 1:1

Instrument: Potentiometric titrator + DGi113-SC non-aqueous acid-base titration electrode

Method 2 , mainly used for monitoring aluminum etching solution production tank - step titration, reason: aluminum and other ions introduced into the sample during production will affect the determination

Step 1: Using the redox method, use 0.1N ammonium ferrous sulfate to titrate HNO3

Solvent: sulfuric acid-water (4:1)
Step 2: Use acid-base titration to titrate H3PO4 and HAc using 0.5N NaOH

Use saturated sodium chloride aqueous solution as solvent: V1 is the first H of nitric acid + phosphoric acid, V2 is the second H of HAc phosphoric acid

Other functional wet electronic chemicals measurement solutions

DispenSix fully automatic sampling and online titration system

All chemical analysis components of the online analysis system are modularly designed. The analysis module design and materials are made of completely corrosion-resistant high-performance materials such as glass, PTFE, PVDF and FEP. In actual use, users can configure according to the detection indicators and set the most suitable analysis cycle according to the factory production requirements. Automatically collect samples and analyze and measure. After the analysis process is completed, the instrument automatically rinses the reaction cup with deionized water, displays the analysis results on the instrument screen, and transmits the data to the LabX software workstation in the central control room via Ethernet. At the same time, the labX workstation can also realize data docking with LIMS, ERP and other systems, truly realizing 24-hour unattended monitoring.

The fully automatic high-precision sampling unit Liquid Handler is a burette function with 6 valves, which can accurately aspirate, drain and prepare liquid, and can monitor the content of acid, alkali, copper ions, etc. in the tank liquid in real time on the production line. The following are the solutions for online determination of hexavalent chromium and online determination of uranium content by Liquidhandler, which shows the diversification of Mettler Toledo's online titration system.

Modular design allows any parts to be replaced or repaired if they are worn or aged. Maintenance is convenient and simple. After training, customers can replace and repair them by themselves.

Today, China has become the world's largest semiconductor consumer market. The next round of terminal demand, such as the Internet of Things, 5G communications, and artificial intelligence, has created new opportunities for the development of the semiconductor industry in mainland China. We have a wide range of application methods and cases for electronic wet chemicals, and can provide a variety of solutions.

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This instrument is very important in chip manufacturing

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