Ultrasonic Motor is a new principle motor developed in the past twenty years. Its principle is different from that of traditional electromagnetic motors. It uses the inverse piezoelectric effect of piezoelectric ceramics to excite ultrasonic vibration, amplifies it with the help of elastic body resonance, and generates rotational motion or linear motion through friction coupling. Its notable features are low speed, large torque, can be used for direct drive, simple structure, good electromagnetic compatibility and power-off self-locking functions. It has gained a place in some special fields. Ultrasonic motors come in various forms. Among them, the output torque of longitudinal-torsional composite ultrasonic motors can reach more than ten times that of traveling wave ultrasonic motors, and the control performance is better. Therefore, the research on longitudinal-torsional composite ultrasonic motors can further expand the application of ultrasonic motors. In the past few years, the output torque was greater than 1 The research on ultrasonic motors with large torque output is mainly concentrated in several research institutions in Japan, and the research on high-torque and high-precision motors in China is almost blank. In recent years, domestic research on longitudinal-torsion composite ultrasonic motors with large torque output characteristics has been carried out, including Zhejiang University, Nanjing University of Aeronautics and Astronautics, Tsinghua University, etc. This paper takes the longitudinal-torsion composite ultrasonic motor with large torque output as the research object, and conducts a systematic and comprehensive study on its friction drive model, vibration mode, selection of friction materials, motor structure design and optimization, and measurement and control system. On this basis, two sets of prototypes are developed, and the maximum torque of each set of prototypes is above 10Nm, and the positioning accuracy reaches 0.025 degrees, forming the theoretical and experimental basis for the large torque and high precision longitudinal-torsion composite ultrasonic motor.
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