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Silicon integrated circuit process fundamentals [Copy link]

 

The book has a total of ten chapters. The first chapter briefly describes the crystal structure of silicon. Chapters 2 to 9 respectively describe the basic single processes in silicon integrated circuit manufacturing, including oxidation, diffusion, ion implantation, physical vapor deposition, chemical vapor deposition, epitaxy, lithography and etching, metallization and multi-layer interconnection. The last chapter talks about process integration.

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