Measurement of surface resistance/surface resistivity, volume resistance/volume resistivity, point-to-point resistance, ground resistance
l Surface resistance, volume resistance, point-to-point resistance, ground resistance unit: Ω
l Surface resistivity unit: Ω/□
l Volume resistivity unit: Ω•cm
l Static dissipative material standard:
n Surface resistance: 104-1011Ω; Surface resistivity: 105-1012Ω/□
n Volume resistivity: 104-1011Ω; Volume resistivity: 104-1011Ω•cm
n Point-to-point resistance: 104-1011Ω
n Work surface ground resistance: < 109 Ω
n Antistatic floor ground resistance: < 109Ω
n Conductive floor ground resistance: < 106Ω
l Test instrument: Weight type electrostatic resistance tester (test method: DC method)
Surface resistance and surface resistivity test
Use TOM600ME or TOM374 electrostatic resistance tester, equipped with RME 1 concentric weight electrode (as shown in Figure 1)
Volume resistance and volume resistivity test
Use TOM600ME or TOM374 electrostatic resistance meter, with a pair of ME250 weight electrodes (as shown in Figure 2)
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