题目:A Chopper Current-Feedback Instrumentation Amplifier with a 1mHz 1/ƒ Noise Corner and an AC-Coupled Ripple-Reduction Loop
作者:Rong Wu, Kofi A.A. Makinwa, Johan H. Huijsing
摘要:In the precision mechatronics of wafer steppers, thermal expansion is an important source of error. To compensate for this, the temperature of critical mechanical components must be measured with high resolution (<1μK), typically by using precision thermistor bridges. Furthermore, this resolution must be maintained over several minutes, which means that the amplifier used for bridge readout should have a 1/f noise corner of only a few mHz. Such noise performance is well beyond the capabilities of currently available CMOS amplifiers [1-3].
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