Can 7nm process be completed without EUV? SMIC responds

Latest update time：2021-05-11

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As the largest and most advanced semiconductor manufacturing company in China, SMIC's progress in advanced processes has attracted attention, among which the 7nm and below nodes are very important, which also involves EUV lithography machines.

A few days ago, a shareholder asked on an interactive platform that there were reports that SMIC had mastered a 7nm-like process without EUV lithography, and asked SMIC to clarify.

In response, SMIC said the company would not comment on rumors.

According to the introduction on SMIC's official website, the most advanced process mentioned by the company is still 14nm, followed by N+1 and N+2 processes, but the specific process nodes were not specified.

Zhao Haijun, co-CEO of SMIC, once said that after three years of accumulation, FinFET technology has achieved good results and N+1 has entered risk mass production. However, due to external factors, the capacity utilization rate of FinFET has been insufficient since the fourth quarter of last year. It takes time to climb the ladder, and revenue contribution has not yet reached the expected level. Depreciation has also placed a burden on the company's overall profitability.

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