A series of Fe(SiO2)(1−x) metal-insulator granular films with different metal contents x were prepared by radio frequency co-sputtering method, and the Hall effect of the films and its generation mechanism were systematically studied. At room temperature and a magnetic field of 1.3 T, when the volume fraction was 0.52, the Hall resistivity reached a maximum value of 18.5 μΩ·cm. The resistivity-temperature curve of the sample showed that the abnormal Hall resistivity may be derived from the scattering effect of 3d localized electron-electron. When the Fe0.52(SiO2)0.48 granular film was tempered at different temperatures within 300℃, the saturated Hall resistivity did not change much with temperature, and the sample had good thermal stability, which indicated that the Fe0.52(SiO2)0.48 granular film had good application prospects in the temperature range of 300℃. Keywords Granular film; Magnetism; Resistivity; Hall effect The Hall effect of semiconductors has been widely used in various magnetic field sensors [1-2]. In ordinary metals, the Hall coefficient is relatively low due to the high carrier concentration. The Hall resistivity in magnetic metals and their alloys is much larger than that in ordinary metals [3]. The main reason is the existence of the anomalous Hall effect in ferromagnetic metals, the magnitude of which is proportional to the magnetization intensity of the material. Reference [4] found in the study of magnetic metal-insulator granular films that when the magnetic particles are near the percolation threshold, their anomalous Hall resistivity is several orders of magnitude larger than that of pure magnetic metals. This phenomenon is called the Giant Hall Effect (GHE) [4]. Compared with semiconductor materials, magnetic metal-insulator granular films near the percolation threshold have better thermal stability and corrosion resistance, and may become ideal materials for making high-sensitivity Hall devices. In addition, the measurement of the giant Hall effect provides a lot of important information for the study of material magnetism, such as carrier type, concentration, mean free path, etc. This paper studies the microstructure, magnetism, transport properties and Hall effect of a series of Fe-Si-O nanogranular films with different Fe volume fractions x. 1 Experimental process Fe-Si-O granular films were prepared by radio frequency sputtering. The target is a composite target composed of high-purity iron sheet and SiO2 target, and the film is deposited on a Kapton substrate. The background vacuum is better than 7×10−4 Pa, and the sputtering Ar gas pressure is 1.2 Pa. The substrate is always cooled by water during the sputtering process. The film thickness is measured by optical interference method, and the film thickness is about 0.82 μm. The composition and content of each element of the sample are analyzed by X-ray energy dispersive analyzer (EDX) and X-ray photoelectron spectroscopy (XPS). The microstructure of the sample is determined by transmission electron microscope (TEM) photos and X-ray diffraction spectra. The magnetic properties of the film are measured by a vibrating sample magnetometer (VSM). The resistivity of the sample at room temperature is measured by the traditional DC four-terminal method. Using a set of dedicated Hall effect measurement system produced by Ketheley (mainly composed of nanovoltmeter, picoammeter, constant current source, programmable switch, Hall card and computer), the Hall resistivity of the film is measured by a five-terminal method with small error and high accuracy. 2 Results and Discussion Figure 1 shows the X-ray diffraction spectrum of a typical sample with a volume fraction of x = 0.52. It can be seen from the figure that the magnetic particles in the film are mainly α-Fe, while Fe2SiO4 and γ-Fe2O3 are very rare. The average diameter of the magnetic grains is estimated to be 16.5 nm by the Scherrer formula. TEM images also show [5] that nanometer-sized Fe particles are uniformly embedded in the SiO2 medium, and their particle diameter is about 15.0 nm, indicating that one particle in this sample contains only one grain. The empirical formula for the magnetic metal Hall effect is: 04πxysRBRMρ=+ (1) where ρxy is the Hall resistivity; R0 is the normal Hall coefficient; Rs is the extraordinary Hall coefficient; and M is the magnetization. The abnormal Hall resistivity can be described by the absolute value of the saturated Hall resistivity, ρxys. The first term in the formula is the normal Hall resistivity, which is mainly due to the Lorentz force of electrons in a magnetic field; the second term is the abnormal Hall resistivity, which is mainly due to the scattering between polarized 3d electrons [3].
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