Micromanipulators are an important part of micromanipulator robots. First, several typical micromanipulators developed at home and abroad are introduced. On this basis, the key technologies of micromanipulators are discussed from the aspects of mechanism, drive, sensing, and detection. In terms of mechanism, the characteristics of micro-displacement positioning mechanism are introduced; in terms of drive mode, the drive method of piezoelectric ceramics is discussed; in terms of micro-displacement detection, several nano-micro-displacement detection methods are introduced. Finally, the development trend of micromanipulators is explained: miniaturization, integration, intelligence, and achieving nano-level or higher positioning accuracy.
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