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Optimization design and electrical simulation of vibrator frame micromechanical gyroscope

2013-09-20
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According to the matching of the driving mode frequency and the detection mode frequency, the structural dimensions of the vibrator frame micromechanical gyroscope were optimized by the finite element method. According to the established equivalent circuit model of gyroscope vibration, the performance of the detection vibration was simulated and analyzed. This model laid the foundation for the overall simulation of the sensor and the interface circuit. Keywords: micromechanical gyroscope; optimization design; equivalent circuit model; simulation Abstract: First acco rding to thematching ing of drivingmode frequency and detection mode frequency, the st ruc2 ture dimensions of the comb2gimbal micromechanical gyro scope are optimized using a finite element method (FEM). Then an equivalent circuit model of gyro scope\'s o scillat ing properties is derived, which is available in detect ion o scillat ing properties analysis and also enables the sensor simulation with the interfacing elect ron2ics.Key words: micromechanical gyroscope; optimization design; equivalent circuit model; simulation

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