In the past, the design optimization of technical systems was usually based on the designer\'s own experience, by changing a system parameter to analyze the system performance. However, with the increasing number of system parameters, this type of optimization has become increasingly difficult. In view of this, this paper introduces the design method of structural optimization of piezoresistive micro-accelerometers using ANSYS software. By analyzing and comparing the original structure and the optimized structure of the piezoresistive micro-accelerometer, the structural sensitivity of the accelerometer has increased by an order of magnitude, and the output sensitivity has increased by more than 4 times. This paper also briefly introduces the working principle of the micro-accelerometer and the related concepts of finite element optimization.
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