Honeywell Zephyr
TM
Digital Airflow Sensors:
HAF Series–High Accuracy
10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM,
200 SLPM or 300 SLPM
Datasheet
Honeywell Zephyr
TM
Digital Airflow Sensors
HAF Series - High Accuracy
Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and
compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors
provide a fast response to air or gas flow.
Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are
10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM, with custom flow ranges available. The
sensors are fully calibrated and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).
The HAF Series >10 SLPM is compensated over the calibrated temperature range of 0 °C to 50 °C [32 °F to 122 °F]. The
state-of-the-art ASIC-based compensation provides digital (I
2
C) outputs with a response time of 1 ms.
These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge
Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films
of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel to
provide repeatable response to flow.
Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability
to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable
substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards.
What makes our sensors better?
Precise measurement:
The industry’s smallest
Total Error Band, fast response time, and high
accuracy provide precise measurement and high
performance in the customer’s application
Saves time:
Configurable and customizable
with a choice of port styles simplifies design and
reduces production time
Cost-effective:
Reduces printed circuit board
(PCB) size and overall design and production
costs
TIGHT TOTAL ERROR BAND • HIGH AccuRAcy • fAsT REspONsE
2
sensing.honeywell.com
Features
and Benefits
Precise measurement maximizes performance.
TOTAL ERROR BAND (TEB)*
Honeywell specifies TEB, the most comprehensive, clear, and meaningful
measurement that provides the sensor’s true accuracy (see Figure 1). TEB allows
for precise airflow measurement, often ideal for demanding applications with high
accuracy requirements for precise airflow measurement.
•
10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM:
– 0 %FS to 12.5 %FS = 0.5% FS
– 12.5 %FS to 100 %FS = 4.0% reading
• 300 SLPM only:
– 0 SLPM to 199 SLPM = 0.5% FS or 4.0% reading
– 200 SLPM to 300 SLPM = 7.0% reading
All Possible Errors
Offset
+
Full Scale Span
+
Linearity
=
Accuracy
+
Flow Hysteresis
Total
Error Band
+
Repeatability
=
+
Temperature Offset
+
Temperature Span
+
Thermal Hysteresis
Figure 1. Total Error Band vs. Accuracy
Other airflow sensor manufacturers only report on accuracy, while Honeywell
reports Total Error Band.
HIGH ACCURACY
Ideal for use in demanding applications that require high accuracy.
•
10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM:
– 0 %FS to 14.3 %FS = 0.5% FS
– 14.3 %FS to 100 %FS = 3.5% reading
• 300 SLPM only:
– 0 %FS to 14.3 %FS = 0.5% FS
– 14.6 %FS to 100 %FS = 3.5% reading
*Competitive Differentiator
sensing.honeywell.com
3
Features
and Benefits
FAST RESPONSE TIME (1 MS)
Allows the customer’s application to respond quickly to a change in airflow, important
in critical medical (e.g., anesthesia) and industrial (e.g., fume hood) applications.
HIGH STABILITY
Reduces errors due to thermal effects and null shift, providing accurate readings
over time and often eliminating the need for system calibration after PCB mount and
periodically over time.
HIGH SENSITIvITY AT vERY LOw FLOwS
Provides a fast response time at the onset or cessation of flow.
HIGH 12-BIT RESOLUTION
Increases the ability to sense small airflow changes, allowing customers to more
precisely control their application.
Simplifies design and integration while reducing costs.
wIDE AIRFLOw RANGE*
The industry’s broadest airflow range measures mass flow with standard flow ranges
of 0-10 SLPM, 0-15 SLPM, 0-20 SLPM, 0-50 SLPM, 0-100 SLPM, 0-200 SLPM, and
0-300 SLPM, or custom flow ranges, increasing the options to integrate the sensor
into the application.
CHOICE OF PORT STYLES*
Manifold mount, 22 mm OD tapered male fitting, and G 3/8 female threaded fitting
provide flexibility to choose the pneumatic connection that is best for the customer’s
application.
LINEAR OUTPUT*
Provides a more intuitive sensor signal than the raw output of basic airflow sensors,
which can help reduce production costs, design, and implementation time.
wIDE SUPPLY vOLTAGE RANGE [3 vDC TO 10 vDC]
Flexible regulated power circuit allows the designer the flexibility to choose the supply
voltage that works best in the system.
ASIC-BASED I
2
C DIGITAL OUTPUT
Simplifies integration to microprocessors or microcontrollers, reducing PCB complexity
and component count.
FACTORY OR CUSTOM CALIBRATION FOR MULTIPLE GAS TYPES
Can be factory calibrated for gas types such as dry air, helium (He), argon (Ar),
nitrogen (N
2
), nitrous oxide (N
2
O), and carbon dioxide (CO
2
), or custom calibrated for
the end customer, eliminating the need to implement gas correction factors.
ROHS-COMPLIANT MATERIALS
Meet Directive 2002/95/EC.
4
sensing.honeywell.com
*Competitive Differentiator
Potential Applications
MEDICAL
ANESTHESIA DELIvERY MACHINES
vENTILATORS
vENTRICULAR ASSIST DEvICES (HEART PUMPS)
SPIROMETERS
LAPAROSCOPY
INDUSTRIAL
ANALYTIC INSTRUMENTATION (SPECTOMETRY, CHROMATOGRAPHY)
AIR-TO-FUEL RATIO
FUEL CELLS
FUME HOODS
GAS LEAK DETECTION
PROCESS CONTROL GAS MONITORING
vACUUM PUMP MONITORING
sensing.honeywell.com
5
京公网安备 11010802033920号
EEWORLD
