Overview of high-precision, ultra-low-range pressure sensors

What is a pressure sensor? What does it do? SMI (Silicon Microstructures, Inc.), a subsidiary of elmos, recently announced the launch of the SM923X series of ultra-low pressure sensors. SM923X series pressure range can be as low as 250Pa (1 inH2O). This fully temperature compensated and pressure calibrated sensor enables accurate pressure measurement in industrial, HVAC and medical applications. SMI's proprietary MEMS pressure sensor technology is integrated with state-of-the-art signal conditioning ICs in a single package, achieving industry-leading output accuracy (1% FS) and long-term stability.

The SM923X series was developed to meet the demanding reliability requirements in industrial, HVAC and medical applications. SMI's compact solutions replace traditional bulky and expensive equipment. The SM923X series product solutions greatly improve the efficiency, detection accuracy and reliability of the system. After circuit board installation and system-level automatic zeroing, the products of this solution can achieve a measurement accuracy of less than 1% of full scale over the entire compensation temperature range. Its 16-bit resolution is capable of resolving pressure signals as low as 0.0038Pa. In addition, its excellent preheating performance and long-term stability further ensure that the device achieves expected performance over its lifetime.

Easy system integration

The SM923X sensor is fully calibrated and user-friendly. Digital I2C interface enables easy system integration. Deep sleep mode enables new application areas such as HVAC wireless sensor technology. This SMI solution integrates high-order noise filtering to provide low noise and extremely low EMI sensitivity. The chip is packaged in a small SO16 with dual vertical ports for easy system integration and pressure detection. The MEMS sensor remains stable under extremely high pressure conditions. This series of sensors is flexible in installation direction and can resist vibration in all directions, thus further reducing product installation and layout.

This series of sensors is divided into three models and is used in pressure switches, VAVs and respiratory equipment. The pressure sensor is available in three configurations: SM9233 (0 to +250 Pa/0 to 1 inH2O), SM9235 (0 to +300 Pa/0 to 1.2 inH2O) and SM9236 (0 to +600 Pa/0 to 2.4 inH2O). These devices are available for sampling and in volume. The SM923X series of chips enables accurate pressure detection, such as leak detection, in industrial control systems such as pressure switches and pneumatic valves. Another application is measuring gas pressure in vacuum pumps. Pressure sensors in HVAC equipment are used for monitoring filtering and VAV control. With SMI's solutions, air can be distributed more intelligently, resulting in energy savings.

In medical applications, ultra-low pressure sensors are used for example to detect ventilation pressure and inspiratory pressure in respiratory devices. Thanks to the sensor's flexible mounting orientation, high resolution and low noise performance, the requirements for integration and use of respiratory equipment are reduced. The SM923X series complements SMI's family of ultra-low pressure sensor solutions. Visit the product page for more information about the SM923X and other products in the SM9000 series, including the SM933X differential ultra-low pressure sensor.

"Decades of experience in low pressure sensors are reflected in the SM9000 series. The SM923X series completes SMI's solutions in low pressure and puts us at the forefront of the market, offering the lowest pressure measurement ranges with the highest accuracy", said Mike Klitzke, SMI's vice president of R&D and business development. "We are excited to see how customers are improving system-level efficiency by using our sensors." The above is the technical overview of pressure sensors, and I hope it can be helpful to everyone.