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Semiconductor integrated circuit reliability testing and data processing

  • 2013-09-22
  • 2.42MB
  • Points it Requires : 1

The main test items for wafer-level reliability of semiconductor integrated circuits include hot carrier injection test of MOS devices, gate oxide integrity test and electromigration test of residual metal interconnects. Effective testing and reliable data analysis are the key to the success of reliability testing.

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