pdf

Study on deep pelvic pressure diaphragm to improve the sensitivity of micro-pressure sensor (Part 2)

  • 2013-09-22
  • 106.19KB
  • Points it Requires : 2

ANSYS - 5.7 was used to perform finite element analysis. First, three types of diaphragms were modeled according to the characteristics of silicon micromechanical technology. The flat diaphragm in Figure 2 (a) has no particularity, but the corrugated diaphragm and deep pelvic diaphragm in Figure 2 (b) and Figure 2 (c) have certain shape requirements. The horizontal area of ​​the three diaphragms is uniformly fixed to 1 × 1 (mm2), of which only 1/4 of the area of ​​the corrugated diaphragm is shown in the figure. The membrane thickness is selected as the typical value of surface micromechanical film 1.2μm. Considering that the formation of the corrugated membrane and pelvic diaphragm is likely to grow on anisotropically corroded silicon, the angle of 54.74° in the figure is determined. For the arrangement and depth of the corrugations on the square membrane,

unfold

You Might Like

Uploader
nishisb
 

Recommended ContentMore

Popular Components

Just Take a LookMore

EEWorld
subscription
account

EEWorld
service
account

Automotive
development
circle

About Us Customer Service Contact Information Datasheet Sitemap LatestNews


Room 1530, 15th Floor, Building B, No.18 Zhongguancun Street, Haidian District, Beijing, Postal Code: 100190 China Telephone: 008610 8235 0740

Copyright © 2005-2024 EEWORLD.com.cn, Inc. All rights reserved 京ICP证060456号 京ICP备10001474号-1 电信业务审批[2006]字第258号函 京公网安备 11010802033920号
×