ANSYS - 5.7 was used to perform finite element analysis. First, three types of diaphragms were modeled according to the characteristics of silicon micromechanical technology. The flat diaphragm in Figure 2 (a) has no particularity, but the corrugated diaphragm and deep pelvic diaphragm in Figure 2 (b) and Figure 2 (c) have certain shape requirements. The horizontal area of the three diaphragms is uniformly fixed to 1 × 1 (mm2), of which only 1/4 of the area of the corrugated diaphragm is shown in the figure. The membrane thickness is selected as the typical value of surface micromechanical film 1.2μm. Considering that the formation of the corrugated membrane and pelvic diaphragm is likely to grow on anisotropically corroded silicon, the angle of 54.74° in the figure is determined. For the arrangement and depth of the corrugations on the square membrane,
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