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SIMS Quantitative Detection of Phosphorus Impurities in Silicon

  • 2013-09-22
  • 512.51KB
  • Points it Requires : 1

The pre-treatment process of the sample will affect the test results. Samples obtained by different treatment processes have different surface roughness. Different surface roughness affects the test time and test accuracy of the sample. At the same time, through instrument debugging, the vacuum degree of the instrument reaches 1×10-10 torr, which reduces the test background and detection limit.

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