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Simulation and analysis of the adjustment curve of MOCVD chip infrared radiation system

  • 2013-09-22
  • 561.54KB
  • Points it Requires : 2

The calculation shows that the peak change of the adjustment curve of the sheet heater heating system on the graphite disk is closely related to the heating power, horizontal position and size of the heater. The paper explains the internal reasons for the peak movement. Some principles for designing heaters are obtained: the more heaters there are, the more flexible the adjustment is; the maximum heating power of the outer ring heater should be greater than that of the inner ring heater; the outermost ring heater should be smaller. The research results provide a reference for the design of the MOCVD reactor heating system and the optimization of heating conditions in actual production.

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