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Design and Experiment of MEMS Electrostatically Actuated Optical Switch

  • 2013-09-20
  • 550.53KB
  • Points it Requires : 2

A self-aligned vertical mirror micromechanical optical switch based on electrostatic actuation is introduced. The optical switch consists of a vertical reflective mirror, a cantilever beam, and an optical fiber positioning groove. The self-alignment of the micro-mirror and the V-shaped optical fiber positioning groove is achieved by the same mask plate. The micro-mirror and the V-shaped optical fiber groove are realized by anisotropic etching of (100) single crystal silicon. The paper gives the structural design of the optical switch and experimentally verifies the processing technology of the self-aligned optical switch.

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