Thermo Fisher Scientific's Helios 5 EXL dual-beam transmission electron microscope accelerates time to mass production

Thermo Fisher Scientific's Helios 5 EXL dual-beam transmission electron microscope accelerates time to volume production through automated sample preparation

Accelerating TEM sample preparation using machine learning

April 20, 2021, Shanghai - Thermo Fisher Scientific, a world leader in serving science, announced the launch of the Helios 5 EXL wafer dual-beam transmission electron microscope, designed to meet the increasing sample volume and corresponding analysis needs of semiconductor manufacturers as they scale up their operations. This product has machine learning and advanced automation capabilities to provide precise sample preparation to support sub-5nm node technology and all-around gate semiconductor processes and yield improvements.

As semiconductor processes move toward smaller and more complex processes, semiconductor manufacturers require more reproducible, high-volume transmission electron microscopy (TEM) analysis results. The growing demand for atomic-level data poses scalability challenges for busy laboratories to use advanced instrumentation to obtain ideal results. Advances in all-around gate technology have increased the demand for more interfaces, thin films, and measurable cross-sections with sub-nanometer resolution, which has also increased the difficulty of upgrading high-volume TEM analysis.

Through machine learning and closed-loop feedback for extreme configuration, Helios 5 EXL provides precise cutting, allowing operators to maintain high-quality output even when performing difficult sample preparation. Compared with existing solutions, improved automation technology optimizes the ratio of machine and manual operation, aiming to maximize sample output and technical resource productivity.

“Semiconductor labs are under tremendous pressure to deliver TEM analysis data faster to support process monitoring and improve learning curves without increasing costs,” said Glyn Davies, vice president of the Semiconductor Division at Thermo Fisher Scientific. “The Helios 5 EXL meets this challenge with scalable, reproducible and high-precision TEM sample preparation.”

Helios 5 EXL maintains the integrity of the wafer structure, helping semiconductor manufacturers extract more data from each wafer than existing solutions to improve the success rate of TEM analysis.