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Test Methods for 3D MEMS Accelerometers

  • 2013-09-22
  • 345.26KB
  • Points it Requires : 2

This article proposes a test method for a three-dimensional MEMS accelerometer and analyzes the performance of the accelerometer based on the test results. The structural advantages and performance characteristics of this type of MEMS accelerometer are pointed out by describing its design principle and internal structure. For this accelerometer, the author designed a test device, made a test circuit, and described the test principle and the entire test process in detail in the article.

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