A pre-circuit of a differential capacitance sensor is proposed. Based on the principle of capacitance/voltage conversion, it measures small capacitance changes. The DC voltage output by the circuit is linearly related to the differential capacitance change, and it can automatically compensate for the deviation capacitance and circuit drift. Experiments show that the measured capacitance resolution is 8 fF and the sensitivity can reach 3. 82 × 1011 V/F. The experimental results are in good agreement with the theoretical analysis. Keywords: capacitive transducer ; low2capacitance measurement ; linear circuit ; capacitance/ voltage conversion Abstract : A prepositive circuit for differential capacitance transducers is proposed. It can be used to detect small capacitance changes based on capacitance to voltage conversion. The output dc voltage is a linear with the com2 plementary capacitance change and can be used to compensate for offset capacitance and drifts automatically. The experiment results show a good correspondence with the theoretical analysis. The resolution of the measurement of capacitance change is 8f F ,and sensitivity is 3. 82 ×1011 V/ F.Key words : capacitive transducer ; low2capacitance measurement ; linear circuit ; capacitance/ voltage conversion
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