A MEMS-based Attitude Reference System The carrier\'s attitude measurement is the basis for the carrier to carry out the expected trajectory movement. There are many ways to measure attitude. Among them, the method of using magnetic field sensors to measure the earth\'s magnetic field to determine the heading has been used since ancient times due to its simple structure, small size, light weight, rapid startup, and low cost. On this basis, this project uses micro-electromechanical system (MEMS) technology to design a micro-azimuth level composed of micro-electromechanical sensors. The system consists of a three-axis micro-accelerometer and a three-axis micro-magnetometer. The direction cosine conversion between the earth\'s magnetic field and gravity field between the geographic coordinate system and the carrier coordinate system is used to perform absolute angle calculation to obtain the attitude angle. The micro-attitude measurement system is small in size, light in weight, low in power consumption, fast in startup, and has no long-term drift. It can perform full-attitude dynamic continuous measurement with an angular measurement accuracy of ±0.5° (pitch and roll) and ±0.7° (heading). Keywords: attitude measurement; micro-electromechanical system (MEMS); micro-accelerometer; micro-magnetometer
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