Freescale Semiconductor
Technical Data
MPXM2202
Rev 2, 09/2005
200 kPa On-Chip Temperature
Compensated and Calibrated
Silicon Pressure Sensors
The MPXM2202 device is a silicon piezoresistive pressure sensors providing
a highly accurate and linear voltage output directly proportional to the applied
pressure. The sensor is a single, monolithic silicon diaphragm with the strain
gauge and a thin-film resistor network integrated on-chip. The chip is laser
trimmed for precise span and offset calibration and temperature compensation.
Features
•
•
•
•
Temperature Compensated Over 0°C to + 85°C
Available in Easy-to-Use Tape and Reel
Ratiometric to Supply Voltage
Gauge Ported and Non Ported Options
MPXM2202
SERIES
COMPENSATED AND CALIBRATED
PRESSURE SENSOR
0 TO 200 kPA (0 TO 29 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
MPAK PACKAGE
Typical Applications
•
•
•
•
•
•
•
Pump/Motor Controllers
Robotics
Level Indicators
Medical Diagnostics
Pressure Switching
Barometers
Altimeters
ORDERING INFORMATION
Device
Type
Non-
ported
Options
Absolute,
Element Only
Absolute,
Element Only
Absolute,
Element Only
Absolute,
Element Only
Ported
Case
No.
MPX Series
Order No.
Packing
Options
Rails
Device
Marking
MPXM2202D
1
2
1320 MPXM2202DT1
1320 MPXM2202A
1320 MPXM2202AT1
Tape & Reel MPXM2202D
Rails
MPXM2202A
MPXM2202D/A
CASE 1320-02
MPXM2202GS/AS
CASE 1320A-02
PIN NUMBER
GND
+V
OUT
3
4
V
S
-V
OUT
1320 MPXM2202D
Tape & Reel MPXM2202A
Rails
MPXM2202G
Absolute, Axial 1320A MPXM2202GS
Port
Absolute, Axial 1320A MPXM2202GST1
Port
Absolute, Axial 1320A MPXM2202AS
Port
Absolute, Axial 1320A MPXM2202AST1
Port
Tape & Reel MPXM2202G
Rails
MPXM2202A
Tape & Reel MPXM2202A
© Freescale Semiconductor, Inc., 2005. All rights reserved.
Figure 1
shows a block diagram of the internal circuitry on the stand-alone pressure sensor chip.
V
S
3
Thin Film
Temperature
Compensation
and
Calibration
Circuitry
1
GND
X-ducer
Sensing
Element
2
V
OUT+
4 V
OUT-
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT VERSUS
APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is directly
proportional to the differential pressure applied.
Table 1. Maximum Ratings
(1)
Rating
Maximum Pressure
Storage Temperature
Operating Temperature
The output voltage of the differential or gauge sensor
increases with increasing pressure applied to the pressure
side relative to the vacuum side. Similarly, output voltage
increases as increasing vacuum is applied to the vacuum
side relative to the pressure side.
Symbol
P
max
T
stg
T
A
Value
400
-40 to +125
-40 to +125
Unit
kPa
°C
°C
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
MPXM2202
2
Sensors
Freescale Semiconductor
Table 2. Operating Characteristics
(V
S
= 10 Vdc, T
A
= 25°C.)
Characteristic
Pressure Range
(1)
Supply Voltage
(2)
Supply Current
Full Scale Span
(3)
Offset
(4)
Sensitivity
Linearity
(5)
Pressure Hysteresis
(5)
(0 to 100 kPa)
Temperature Hysteresis
(5)
(-40°C to +125°C)
Temperature Effect on Full Scale Span
(5)
Temperature Effect on Offset
(5)
Input Impedance
Output Impedance
Response Time
(6)
(10% to 90%)
Warm-Up
Offset Stability
(7)
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self-heating.
3.
Full Scale Span (V
FSS
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4.
Offset (V
off
) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
• Linearity:
•
•
•
•
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to
and from the minimum or maximum operating temperature points, with zero differential pressure applied.
TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C.
MPXM2202D/G Series
MPXM2202A Series
MPXM2202D/G Series
MPXM2202A Series
Symbol
P
OP
V
S
I
O
V
FSS
V
OFF
∆V/∆P
—
—
—
—
TCV
FSS
TCV
OFF
Z
IN
Z
OUT
t
R
—
—
Min
0
—
—
38.5
-1.0
-2.0
—
-0.6
-1.0
—
—
-2.0
-1.0
1000
1400
—
—
—
Typ
—
10
6.0
40
—
—
0.2
—
—
±0.1
±0.5
—
—
—
—
1.0
20
±0.5
Max
200
16
—
41.5
1.0
2.0
—
0.4
1.0
—
—
2.0
1.0
2500
3000
—
—
—
Unit
kPa
Vdc
mAdc
mV
mV
mV/kPa
%V
FSS
%V
FSS
%V
FSS
%V
FSS
mV
Ω
Ω
ms
ms
%V
FSS
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a
specified step change in pressure.
7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
MPXM2202
Sensors
Freescale Semiconductor
3
LINEARITY
Linearity refers to how well a transducer's output follows
the equation: V
OUT
= V
OFF
+ sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see
Figure 2)
or
(2) a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. The
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange
pressure.
Least Squares Fit
Exaggerated
Performance
Curve
Relative Voltage Output
Least
Square
Deviation
Least
Square
Deviation
Straight Line
Deviation
End Point Straight Line Fit
Offset
0
50
Pressure(% Fullscale)
100
Figure 2. Linearity Specification Comparison
ON-CHIP TEMPERATURE COMPENSATION AND
CALIBRATION
Figure 3
shows the minimum, maximum and typical output
characteristics of the MPXM2202 series at 25°C. The output
is directly proportional to the differential pressure and is es-
sentially a straight line.
A silicone gel isolates the die surface and wire bonds from
the environment, while allowing the pressure signal to be
transmitted to the silicon diaphragm.
40
35
Output (mVdc)
30
25
20
15
10
5
0
-5
0
V
S
= 10 Vdc
T
A
= 25°C
TYP
MAX
Span
Range
(TYP)
MIN
kPa
PSI
25
50
7.25
75
100
14.5
125
150
21.75
175
200
29
Offset
(TYP)
Figure 3. Output versus Pressure Differential
MPXM2202
4
Sensors
Freescale Semiconductor
PACKAGE DIMENSIONS
PAGE 1 OF 2
CASE 1320-02
ISSUE B
MPXM2202
Sensors
Freescale Semiconductor
5
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