Liquid Leakage Sensor Amplifiers
K7L-AT50/-AT50D
• Ultra-high sensitivity detects impedances of up to 50 M .
• Polyethylene makes the Sensing Band more resistant to chemicals.
• Series includes models with
disconnection detection.
*The color of the Sensing Band shown here is a conceptualization and is not necessarily the actual color.
Features
Sensing Bands boast high degree of chemical resistance. The K7L can be used in a wide range of
applications, from semiconductor production installations to food-processing equipment.
Inter-electrode Resistance Detection
Stable detection of liquids with
impedances of up to 50 M
Ω
and common water. Four sens-
ing ranges are available, ensur-
ing detection suited to the
application.
Fresh water, pure
water, distilled water,
plating liquids,
chemical liquids, IPA
(isopropyl alcohol)
■
Application Examples
Liquid Leakage Detection for
Measuring Baths in CMP Devices
Liquid leaked to drain pans can be detected to prevent damage to
devices and cleaning irregularities for wafers.
AC Detection Method
Oscillator
Detector
The K7L internally oscillates AC sig-
nals provided to the Sensing Band,
protecting the Sensing Band from
electric corrosion and ensuring safe
operation.
Detection of Condensation and Liquid
Leakage at Semiconductor Production
Installations
Detection is also possible for condensation inside cleaning devices
and liquid leaked to the surroundings.
Current
Noise Canceller Function (Patent
Pending)
K7L-AT50
The K7L incorporates a noise cancel-
ler circuit that uses a 3-conductor
cable, ensuring a high level of noise
immunity.
Connecting cable
Detection of Liquid Leakage at Pipe
Joints for Liquid Chemical Tanks
Liquid leakage at a pipe joint can be detected by wrapping the Sens-
ing Band around the joint.
The power supply circuit and
the detection circuit are iso-
lated, allowing several Amplifi-
ers to be installed in the same
place.
Multiple Installation
Sensing Band with Excellent Chemical
Resistance
SUS316 and polyethylene
are used for the Sensing
Band’s core and sheath to
ensure high resistance to
both acidic and alkaline liq-
uids.
Detection of Cleaning Fluid Level for
Plating Devices
The level of pure water is detected inside plating baths. High sensi-
tivity allows high-accuracy control to prevent cleaning irregularities.
Note:
Be sure to ground the baths if two or more K7L Sensors are
used in the same tank in an explosion-prevention area.
2
Liquid Leakage Sensor Amplifier
K7L-AT50/-AT50D
Liquid Leakage Sensor Amplifier
K7L-AT50
Ultra-miniature Sensor Amplifier Reliably
Detects a Wide Variety of Liquids Ranging
from Water to Liquid Chemicals with Low
Conductivity.
• Detects liquids with impedance as high as 50 MΩ using inter-
electrode resistance detection. Detection of IPA and pure water
is possible.
• Four selectable sensing ranges ensure detection suited to the
characteristics of the liquid.
• Incorporates a noise canceller circuit connected to a 3-conduc-
tor cable, ensuring a high level of noise immunity and reliable
operation (patent pending).
• The power supply block and Sensing Band are isolated, allow-
ing the installation of more than one device in the same place.
Ordering Information
Product name
Liquid Leakage Sensor Amplifier
Sensors
Sensing Band
Model
K7L-AT50
F03-16PE
F03-15
F03-16PT
F03-16SF
F03-16SFC
Point Sensor
Mounting Brackets
and Stickers
F03-16PS
F03-16PS-F
Sensing Band Stick-
F03-25
ers
F03-26PES
F03-26PEN
F03-26PTN
Point Sensor Mount-
F03-26PS
ing Brackets
Terminal Blocks
Track-mounted Socket
F03-20
P2RF-08-E
P2RF-08
Note: 1.
2.
3.
4.
---
Standard model
Greater durability and condensation resistance. (See note 1.)
Greater temperature and chemical resistance. (See note 1.)
Greater flexibility and superior workability. (See note 1.)
Greater flexibility and enables visual confirmation when the inner color ap-
pears.
Easier to wipe off than the band type.
Electrodes have fluororplastic coating to resist chemicals.
Used for F03-15 or F03-16SF(C).
Used for F03-16PE (adhesive tape).
Used for F03-16PE (screws).
Used for F03-16PT (screws).
Used for F03-16PS.
---
---
---
Characteristics
Compared with the standard model, F03-16PE.
One F03-20 Terminal Block is included as an accessory with the K7L-AT50.
The minimum order for the F03-25, F03-26PES, or F03-26PEN Sensing Band Stickers is one set (contains 30 Stickers).
The minimum order for F03-20 Terminal Blocks, F03-26PTN Sensing Band Stickers, or F03-26PS Point Sensor Mounting Brackets is one
set (contains 10 Terminal Blocks, Stickers, or Mounting Brackets).
■
Available Sensing Band Lengths
1m
F03-16PE
F03-15
F03-16PT
F03-16SF(C)
OK
OK
OK
2m
OK
OK
OK
5m
OK
OK
OK
OK
10 m
OK
OK
OK
OK
15 m
OK
OK
OK
OK
20 m
OK
OK
OK
OK
OK
OK
OK
OK
OK
OK
OK
OK
25 m
OK
OK
30 m
40 m
50 m
OK
OK
OK
OK
60 m
70 m
75 m
80 m
90 m
100 m
Note: 1.
To place an order for 1 m of the F03-16PE for example, specify F03-16PE-1M.
2.
If you cannot find the length you need, please order the nearest larger length, then cut it to the required size.
Liquid Leakage Sensor Amplifier
K7L-AT50
3
Specifications
■
Ratings
Rated power supply voltage
Operate resistance
12 to 24 VDC (Allowable voltage fluctuation range: 10 to 30 VDC)
0
Ω
to 50 M
Ω
, variable
Range 0: 0 to 250 k
Ω
Range 1: 0 to 600 k
Ω
Range 2: 0 to 5 M
Ω
Range 3: 0 to 50 M
Ω
Note:
The range is set using the DIP switch on the side of the Sensor Amplifier. (Refer to
DIP Switch Set-
tings.)
Set the corresponding pin of the DIP switch in the up position. (For range 0, set all 3 pins in
the down position.) The adjuster (ADJUST) on the top of the Sensor Amplifier sets the resistance
value for detection within the set range. It is factory-set to the upper limit. (Normally, the K7L can
be used with the adjuster at this setting.) With any range, resistance values can be set from 0
Ω
.
Release resistance
Output configuration
105% min. of operate resistance
NPN open-collector transistor output with 100 mA at 30 VDC max.
Note:
If the rightmost pin of the DIP switch on the side of the Sensor Amplifier is set to the down position,
the output turns ON when liquid is detected; if it is set to the up position, the output turns OFF when
liquid is detected.
Wiring distance
Connecting cable: 50 m max.
Sensing Band length: 10 m max.
Note:
These values are possible on condition that a completely insulated 3-conductor VCT cable with a
thickness of 0.75 mm
2
and a dielectric strength of 600 V is used together with a Liquid Sensing
Band specified by OMRON. (A 0.2-mm
2
cable can also be used.)
Accessories
F03-20 Terminal Block (for connecting the connecting cable and Sensing Band)
Screwdriver for ADJUST setting.
(Purchase the Sensing Band, Sensing Band Stickers, connecting cable, and Socket separately.)
File No. E138234
File No. LR95291-21
EMS: EN 61000-6-2
EMI: EN 55011
Note:
UL
CSA
CE
■
Characteristics
Ambient temperature
Ambient humidity
Insulation resistance
Dielectric strength
Power consumption
Response time
Weight
Operating: –10 to 55
°
C
Operating: 45% to 85%
10 M
Ω
at 100 VDC between case and current-carrying parts
1,000 VAC at 50/60 Hz for 1 min between case and current-carrying parts
1 W max.
Operate:
Release:
800 ms max.
800 ms max.
Approx. 14 g
4
Liquid Leakage Sensor Amplifier
K7L-AT50
Nomenclature
Power indicator (green)
(Lit when power is sup-
plied.
Output indicator (red)
(Lit when output
is ON.)
Resistance
value adjuster
■
DIP Switch Settings
Setting Sensing Range
DIP switch
Range number
Range 0
Range 1
Range 2
[
Sensing range
0 to 250 k
Ω
0 to 600 k
Ω
0 to 5 M
Ω
0 to 50 M
Ω
DIP switch
Output mode
Output OFF when liquid leakage
detected.
Output ON when liquid leakage
detected.
Range 3
•
Set the sensing range according to the impedance of the liquid to
be detected. (If the sensing range DIP switch pins are set in a way
not shown above, the actual range used will be the largest one by
default.) For the setting method, refer to the label on the side of the
Sensor Amplifier.
•
It is possible to set the resistance value within the set sensing
range using the resistance value adjuster. At time of delivery, it is
set to the largest possible value and this setting can be used for
normal use.
•
The resistance value adjuster is a precision component. Do not
apply a torque to the resistance value adjuster in excess of the
specified one. Doing so may cause the resistance value adjuster to
be damaged.
Applicable torque:
•
Rotational torque: 9.81 m N·m max.
•
Detent strength: 29.4 m N·m min.
Operation
■
Countermeasures Against Noise
Noise Canceller Function for Highly
Sensitive Impedance Detection
The K7L Liquid Leakage Sensor Amplifier detects liquids with imped-
ance as high as 50 M
Ω
and connects to the Sensing Band through a
cable that can be extended up to 50 meters. Countermeasures
against external noise are especially important for the Sensing Band
and connecting cable because they pick up external noise like an
antenna. The K7L incorporates the noise canceller function
described below.
Connected with 3-conductor Cable that
Offsets Inductive Noise (Patent Pending)
A VCT cable with three conductors (lines) is used. Line 1 is con-
nected to the Sensing Band and line 2 is left open. Lines 1 and 2 are
almost in the same position and thus will experience the same noise
level. The K7L obtains the difference between these signals. This
means that the noise signals in lines 1 and 2 are offset against each
other and a reading for the signal, without inductive noise, can be
made.
K7L signal transmission circuit
Signal transmission
line
Sensing Band
Line 1
Line 2
Connecting cable
Resistance measurement circuit
Subtraction circuit
Liquid Leakage Sensor Amplifier
K7L-AT50
5
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