A 15-to-45 GHz Low-Loss Analog Reflection-Type MEMS Phase

JasonYoo

A 15-to-45 GHz Low-Loss Analog Reflection-Type MEMS Phase [Copy link]

Abstract - A low-loss broadhand reflection-type phase
shifter (RTPS), showing constant phase shift from 15 to 45
GHg was developed using MEMS technology. The analog
phase shifter consists of two cascaded reflection-type phase
shiftem for 1:3 bandwidth. Air-gap overlay CPW couple?
wem employed for low-loss 3 dB coupling, and hridge-type
MEMS variable capaciton were used for low-loss reflective
terminations. The fabricated phase shifter shows the average
insertion loss of 3.63d8, and ms phase error of 3.1" from 15
to 45 GHz. Compared with the similar RTPS using GaAs
PHEMT varactor diodes, much lower loss is observed
together with improved bandwidth.