The Development Trend of Measurement Technology and Instruments in the 21st Century

fighting

The Development Trend of Measurement Technology and Instruments in the 21st Century [Copy link]

Measurement technology and instruments involve the measurement of all physical quantities and are closely related to materials, engineering science, and energy science. The current development trends are as follows:

(1) Traceability and transmission based on natural benchmarks, while achieving international comparison at different ranges. If you do not have the ability to compare yourself, you have to rely on other countries.

(2) High precision. The typical line width of semiconductor technology is currently 0.25μm, and is transitioning to 0.18μm. The predicted line width in 2009 is 0.07μm. If the positioning requirement accounts for 1/3 of the line width, then an accuracy of 10nm is required, and the chip size is still increasing, reaching 300mm. This means that the accuracy of the measurement and positioning system must be better than 3×10-8, and the corresponding laser frequency stabilization accuracy should be 10-9.

(3) High speed. The speed of processing machinery has now increased to more than 1m/sec, and the instruments developed before the 1980s are no longer able to meet market demand. For example, most of HP's interferometer market is occupied by Renishaw in the UK, because the latter's speed has reached 1m/sec.

(4) High sensitivity, high resolution, and miniaturization. For example, the spectrometer can be integrated into a circuit board.

(5) Standardization. In the past, GPIB and RS232 were commonly used as communication interfaces. Currently, USB, IEEE1394, and VXI are high-performance standards that may become substitutes. Now, technology leaders try to control technical standards, and participating in standard formulation is one of the basic research tasks of instrument development.

The current status of the development of instrument technology in China

(1) Due to the long-term habit of imitating foreign products, China's instrument industry lacks innovation capabilities and cannot keep up with the needs of scientific research and engineering construction.

(2) China has accumulated a large number of scientific research results in the field of instrument science and technology research. Many of the results are at the international leading level and need to be screened, improved, and transformed, but the degree of industrialization is very low, and a complete industry with international competitiveness has not been formed.

Future development trends

1. Development direction and discipline frontiers

(1) Coordinate with the technical innovation of CNC equipment (such as spindle speed, precision creation)

The main error sources of CNC equipment can be divided into geometric errors (a total of 21 items) and thermal errors. For recurring system errors, software correction can be used; for large random errors, real-time correction methods should be used. Thermal errors are generally corrected by temperature measurement. One of the reasons why China's machine tool industry market is shrinking and a large number of foreign equipment are imported is that the technology in this area has not been promoted and applied. For this reason, a high-speed multi-channel laser interferometer is needed: its measurement speed is above 60m/min and the sampling speed is above 5000 times/sec to meet the needs of thermal error and geometric error measurement. The real-time measurement of air refractive index should reach the level of 2×10-7, and its measurement results and length measurement results can be input into the computer simultaneously.

(2) Monitoring and online detection technology of operation and manufacturing process

Comprehensive use of image, spectrum, spectrum, optical fiber and other sensors based on the principle of interaction between light and matter have the advantages of non-contact, high sensitivity, high flexibility and wide application range. There is a wide space for comprehensive innovation in this field, such as vibration, roughness, pollutants, water content, processing size and relative position.

(3) Technological innovation in cooperation with information industry and production science

In order to seek survival space in an open environment, there is no way out without independent innovation technology. Therefore, some projects should be selected for support based on the principles of patent rights, technical content and market. According to the current development status, products needed in the fields of information, life medicine, environmental protection, agriculture, etc. should be given priority support. For example, precision instruments and equipment for interventional treatment in medicine, super-resolution lithography and cleaning methods and mechanism research in the electronics industry, etc.

2. Priority areas

In the early stages of basic research, it is difficult to predict whether there will be breakthroughs. However, when breakthroughs have been made, a transformation mechanism is needed to enter the market.

(1) Nano-traceability technology and system.

(2) Coordinate tracking measurement system for interventional installation and manufacturing.

Key theories and technologies: super-hemispherical reflector (n=2 or innovation in structure), fast, multi-channel interferometer (frequency difference 3 to 5 MHz), two-dimensional precision tracking angle measurement system (0.2″~0.5″), general signal processing system (operating frequency 5 MHz), guideless semiconductor laser measurement system (resolution 1μm), thermal deformation simulation, force deformation simulation.

These contents are not limited to one technical solution, but are the common points summarized from several different technical solutions. If a non-guide interferometer is used, the requirements for the tracking system can be reduced; a two-dimensional precision tracking angle measurement system can achieve high accuracy within the 1M3 measurement range; and a super-hemispherical reflector can improve the accuracy of the 4-way tracking solution. On-site intervention manufacturing and assembly cannot wait for a long time. Compensation for force and thermal deformation is necessary and needs to be fast enough. There is still a considerable gap in current technology, so these advances are critical.

Application scope: identification of new parallel mechanism machine tools, identification of aircraft assembly jigs, installation of large equipment, calibration of precision robots for biochips, etc.

(3) Non-contact probes and various scanning probe microscopes

The aerospace industry has put forward urgent requirements for this, which is a key technology for the future development of coordinate measuring machines. At present, contact probes have been completely monopolized by foreign countries, and non-contact probes have not yet matured. We have the opportunity to participate in the competition. The laser triangulation principle that was used more frequently in the past was subject to many restrictions and it was difficult to make breakthroughs, but efforts can be made in principle innovation. The resolution should be broken through 0.1 to 0.5 μm. (4) Standardization, modularization, compatibility and integration of

computer-aided measurement theory signal processing systems.

For example, most computers currently use ISA bus and IEEE488 port. In the future, computers may cancel ISA bus, and USB port for laptops will be widely used. In the past, instruments produced in China were satisfied with digital display and had no data exchange interface, making it difficult to enter the international market. Foreign instruments are generally equipped with IEEE488 (GPIB) port. RS232: The high-performance standards that may become substitutes are USB, IEEE1394 and VXI. This transition period provides us with opportunities. At present, the working frequency band of virtual instruments is in the kilohertz range, which is too low for interference signal processing. We can adopt a joint complementary method to form a module series, while reducing costs and improving the efficiency of R&D work in general. Based on the existing foundation, developing expertise is conducive to overcoming duplication of research.

(5) New devices and new materials

In the past, the scientific research evaluation system has tended to focus on complete machines and systems and ignore materials and devices. New breakthroughs may appear in new light sources and new high-frequency detectors. At present, the response frequency of the detector is only 10 to the 9th power, while the optical frequency is as high as 10 to the 14th power. At present, the interferometer actually plays the role of a mixer to adapt to the shortcomings of the detector (if the response of the detector can really exceed the optical frequency, the interferometer will be useless). If the performance of the detector is significantly improved, it will also be a major breakthrough for communications.

(6) Research and innovation of semiconductor laser metrology characteristics . The use

of semiconductor lasers for metrology requires solving many problems (such as line width, calibration, frequency conversion, etc.). However, if many problems are solved, the semiconductor laser system will be more complex than the gas laser system and will not be competitive. Some problems have not been completely solved at the physical level. For example, if a semiconductor laser can form dual frequencies, it is undoubtedly a very important feature. If it can both sweep the frequency and have two similar frequency scans, it will become a new guide-free measurement tool.

(Source: Test Instrument Network)