FBO Series
Mass flow sensors for gases
FEATURES
· Ranges 0...±30 to 0...±1000
or -600...1000 sccm
1
· Bidirectional sensing
· Actual mass flow sensing
· Sensortechnics PRO services
MEDIA COMPATIBILITY
To be used with dry gases only
The FBO series is NOT designed for
liquid flow and will be damaged by
liquid flow through the sensor
SPECIFICATIONS
Maximum ratings
Supply voltage
2
8 to 15 V
typ. 10 ±0.01 V
max. 50 mW
typ. 30 mW
ELECTRICAL CONNECTION
Power consumption
P1
P2
Temperature limits
Operating
Storage
Mechanical shock
-25 to 85°C
-40 to 90°C
100 g (5 drops, 6 axes)
1 2 3 4 5 6
Note:
1
sccm denotes standard cubic centimeters per minute
2
Output voltage is ratiometric to supply voltage
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FBO Series
Mass flow sensors for gases
FLOW SENSOR CHARACTERISTICS
3
(V
S
= 10 ±0.01 V, T
A
= 25°C)
Part no.
FBOM200DB
FBOM030DB
FBOL001DB
FBOL001DBX
Flow range
(full scale)
±200 sccm
±30 sccm
±1000 sccm
-600...1000 sccm
Max. flow change
4
5.0 l/sec
5.0 l/sec
5.0 l/sec
5.0 l/sec
Output voltage
@ trim point
30 mV @ 100 sccm
11.8 mV @ 25 sccm
50 mV @ 650 sccm
50 mV @ 650 sccm
PERFORMANCE CHARACTERISTICS
(V
S
= 10 ±0.01 V, T
A
= 25°C)
Characteristics
Zero offset
Repeatability and hysteresis
(combined)
Offset
Temperature effects
Span
FBOL001DB
all others
-25 to 85 °C
5
-25 to 25 °C
FBOM200DB
FBOM030DB
FBOL001DB
FBOL001DBX
25 to 85 °C
FBOM200DB
FBOM030DB
FBOL001DB
FBOL001DBX
Sensor resistance
(Pin 2 - Pin 1, Pin 6 - Pin 1)
Sensor current
(Pin 2 - Pin 1, Pin 6 - Pin 1)
Response time
Common mode pressure
Min.
-1.0
Typ.
0
Max.
1.0
±1.0
±0.35
Unit
mV
% reading
mV
±0.20
2.5
5.0
5.0
5.0
-2.5
-5.0
-5.0
-5.0
5
0.6
1.0
3.0
25
% reading
kOhm
mA
ms
p si
Notes:
3
A 5 micron filter is recommended for all devices.
4
Maximum allowable rate of flow change to prevent damage.
5
Shift is relative to 25 °C.
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FBO Series
Mass flow sensors for gases
FLOW SPECIFICATIONS
(V
S
= 10 ±0.01 V, T
A
= 25°C)
FBOM200DB
Press.
Flow
(mbar)
(sccm)
6
0.49
0.35
0.21
0.09
0.00
0.00
-0.21
-0.35
-0.49
200
150
100
50
0
50
-100
-150
-200
FBOM030DB
FBOL001DB
FBOL001DBX
Nom.
Tol.
(mV) (± mV)
55.50
52.90
50.00
42.50
29.20
0.00
-28.90
-41.20
-48.20
7.0
6.0
5.0
6.0
5.0
1.5
15.0
26.0
30.0
Nom.
Tol.
Press.
Flow
Nom. Tol.
Press.
Flow
(sccm)
6
(mV) (± mV) (mbar)
(sccm)
6
(mV) (± mV) (µbar)
44.50
38.75
30.00
16.50
0.00
16.50
-30.00
-38.80
-44.50
4.25
3.00
1.50
2.50
1.00
4.50
5.00
7.65
9.75
53
36
17
9.8
7.4
6.2
5
2.5
0
-9.8
-53
30
20
10
5
4
3
2
1
0
-5
-30
14.0
9.5
5.0
2.5
2.0
1.5
1.0
0.5
0.0
-2.5
-14.0
2.5
1.5
1.5
1.0
1.0
1.0
1.0
0.8
0.6
2.0
5.0
3.4
2.4
1.8
0.83
0.31
0
-0.31
-0.83
-1.6
-2.4
-3.4
1000
800
650
400
200
0
-200
-400
-600
-800
-1000
Nom.
Tol.
Press.
Flow
(mV) (± mV) (mbar)
(sccm)
6
55.50
52.90
50.00
42.50
29.20
0.00
-28.90
-41.20
-48.20
-52.20
-55.00
3.70
3.50
2.50
3.00
3.20
1.00
15.00
26.00
29.50
32.50
36.00
3.4
2.4
1.8
0.83
0.31
0
-0.31
-0.83
-1.6
1000
800
650
400
200
0
-200
-400
-600
Note:
6
Devices are calibrated in mass flow. Tolerance values apply to calibration type only.
OUTPUT VS. FLOW CURVES
FBOM200DB
FBOM030DB
FBOL001DB
FBOL001DBX
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FBO Series
Mass flow sensors for gases
HEATER CONTROL CIRCUIT
SENSING BRIDGE SUPPLY CIRCUIT
Note:
These circuits are required for operation per specifications. Circuits are not on board the sensor.
DIFFERENTIAL INSTRUMENTATION AMPLIFIER CIRCUIT (optional)
2
R
+
R
1
R
4
(
V
2
−
V
1
)
+
V
Offset
V
O
=
2
R
R
1
3
R
6
where
V
Offset
=
V
S
R
+
R
5
6
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FBO Series
Mass flow sensors for gases
OUTLINE DRAWING
7.60
(0.30)
2.8
(0.11)
2.9
(0.114)
1.40
(0.055)
6.3
(0.25)
1.8
(0.07)
5.1
(0.20)
54.4
(2.14)
8.3
(0.325)
8.4
(0.33)
P1
P2
31.5
(1.24)
23.6
(0.93)
2.8
(0.11)
1.0
(0.04)
5.1
(0.20)
7.4
(0.29)
12.7
(0.50)
15.5
(0.61)
1 2 3 4 5 6
0.6
(0.025)
1.52
(0.06)
2.5
(0.10)
4.1
(0.16)
23.9
(0.94)
30.5
(1.20)
third angle projection
mass:
approx. 10.8 g
dimensions in mm (inches)
Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and
results in positive output (pin 6 > pin 2). Negative flow direction is defined conversely
and results in negative output (pin 6 < pin 2).
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