Pressure
Freescale Semiconductor
Data Sheet: Technical Data
Document Number: MPX2202
Rev 8, 10/2012
200 kPa On-Chip Temperature
Compensated Silicon
Pressure Sensors
The MPX2202 devices series are silicon piezoresistive pressure sensor
providing a highly accurate and linear voltage output directly proportional to
the applied pressure. The sensor is a single monolithic silicon diaphragm with
the strain gauge and a thin-film resistor network integrated on chip. The chip
is laser trimmed for precise span and offset calibration and temperature
compensation. They are designed for use in applications such as pump/
motor controllers, robotics, level indicators, medical diagnostics, pressure
switching, barometers, altimeters, etc.
MPX2202
Series
0 to 200 kPa (0 to 29 psi)
40 mV Full Scale
(Typical)
Application Examples
•
•
•
•
•
•
•
Pump/Motor Controllers
Robotics
Level Indicators
Medical Diagnostics
Pressure Switching
Barometers
Altimeters
Features
•
•
•
•
•
Temperature Compensated Over 0C to +85C
Easy-to-Use Chip Carrier Package Options
Available in Absolute, Differential and Gauge Configurations
Ratiometric to Supply Voltage
Available in Easy-to-Use Tape and Reel
ORDERING INFORMATION
Case
No.
None
Unibody Package (MPX2202 Series)
MPX2202A
344
•
MPX2202DP
344C
Device Name
MPX2202AP
MPX2202GP
MPX2202ASX
344B
344B
# of Ports
Single
Dual
Gauge
Pressure Type
Differential
Absolute
Device Marking
MPX2202A
MPX2202DP
MPX2202AP
MPX2202GP
MPX2202A
MPXV2202GP
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
344F
Small Outline Package (MPXV2202 Series)
MPXV2202GP
1369
MPXV2202DP
1351
MPXV2202GC6TI
482A
MPAK Package (MPXM2202 Series)
MPXM2202D
1320
•
MPXM2202DT1
1320
•
MPXM2202A
MPXM2202GS
MPXM2202GST1
MPXM2202AS
1320
1320A
1320A
1320A
MPXV2202DP
MPXV2202G
MPXM2202D
MPXM2202D
MPXM2202A
MPXM2202GS
MPXM2202GS
MPXM2202AS
•
© 2005-2008, 2012 Freescale Semiconductor, Inc. All rights reserved.
Pressure
UNIBODY PACKAGES
MPX2202A
CASE 344-15
MPX2202AP/GP
CASE 344B-01
MPX2202DP
CASE 344C-01
MPX2202ASX
CASE 344F-01
SMALL OUTLINE PACKAGES
MPAK
MPXV2202DP
CASE 1351-01
MPXV2202GP
CASE 1369-01
MPXV2202GC6T1
CASE 482A-01
MPXM2202A
CASE 1320-02
MPXM2202GS/AS
CASE 1320A-02
MPX2202
2
Sensors
Freescale Semiconductor, Inc.
Pressure
Operating Characteristics
Table 1. Operating Characteristics
(V
S
= 10 Vdc, T
A
= 25C unless otherwise noted, P1 > P2)
Characteristics
Pressure Range
(1)
Absolute Pressure Range MPX2202A
Differential Pressure Range MPX2202D
Supply Voltage
(2)
Supply Current
Full Scale Span
(3)
Offset
(4)
MPX2202D, MPXM2202D/G Series
MPX2202A, MPXM2202A Series
Sensitivity
Linearity
(5)
MPXM2202D/G, MPX2202D Series
MPXM2202A, MPX2202A Series
Pressure Hysteresis
(5)
(0 to 200 kPa)
Temperature Hysteresis
(5)
(-40C to +125C)
Temperature Effect on Full Scale Span
(5)
Temperature Effect on Offset
(5)
Input Impedance
Output Impedance
Response Time
(6)
(10% to 90%)
Warm-Up
Offset Stability
(7)
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self-heating.
3. Full Scale Span (V
FSS
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (V
off
) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
Linearity:Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range.
Temperature Hysteresis:Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and
from the minimum or maximum operating temperature points, with zero differential pressure applied.
Pressure Hysteresis:Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or
maximum rated pressure, at 25C.
TcSpan:Output deviation at full rated pressure over the temperature range of 0 to 85C, relative to 25C.
TcOffset:Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a
specified step change in pressure.
7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
—
-0.6
-1.0
—
—
-2.0
-1.0
1000
1400
—
—
—
—
—
0.1
0.5
—
—
—
—
1.0
20
0.5
0.4
1.0
—
—
2.0
1.0
2500
3000
—
—
—
%V
FSS
V
off
V/P
-1.0
-2.0
—
—
—
0.2
1.0
2.0
—
mV
P
OP
P
OP
V
S
I
o
V
FSS
20
0
—
—
38.5
—
—
10
6.0
40
200
200
16
—
41.5
kPa
kPa
Vdc
mAdc
mV
Symbol
Min
Typ
Max
Unit
mV/kPa
—
—
TCV
FSS
TCV
off
Z
in
Z
out
t
R
—
—
%V
FSS
%V
FSS
%V
FSS
mV
ms
ms
%V
FSS
MPX2202
Sensors
Freescale Semiconductor, Inc.
3
Pressure
Maximum Ratings
Table 2. Maximum Ratings
(1)
Rating
Maximum Pressure (P1 > P2)
Storage Temperature
Operating Temperature
Max Value
400
-40 to 125
-40 to 125
Unit
kPa
C
C
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Voltage Output versus Applied Differential
The differential voltage output of the sensor is directly
proportional to the differential pressure applied.
The absolute sensor has a built-in reference vacuum. The
output voltage will decrease as vacuum, relative to ambient,
is drawn on the pressure (P1) side.
The output voltage of the differential or gauge sensor
increases with increasing pressure applied to the pressure
V
S
3
Thin Film
Temperature
Compensation
and Calibration
Circuitry
1
GND
(P1) side relative to the vacuum (P2) side. Similarly, output
voltage increases as increasing vacuum is applied to the
vacuum (P2) side relative to the pressure (P1) side.
Figure 1
illustrates a block diagram of the internal circuitry
on the stand-alone pressure sensor chip.
2
4
Sensing
Element
+V
OUT
–V
OUT
Figure 1. Temperature Compensated and Calibrated
Pressure Sensor Schematic
MPX2202
4
Sensors
Freescale Semiconductor, Inc.
Pressure
On-Chip Temperature Compensation and Calibration
40
35
30
25
Output (mV
DC
)
20
15
10
5
0
kPa
PSI
-5
0
VS = 10 V
DC
T
A
= 25C
P1 > P2
MAX
TYP
Span
Range
(TYP)
MIN
25
50
7.25
75
100 125
14.5
Pressure
150
21.75
175
200
29
Offset
(TYP)
Figure 2. Output vs. Pressure Differential
Figure 2
shows the output characteristics of the MPX2202
series at 25C. The output is directly proportional to the
differential pressure and is essentially a straight line.
The effects of temperature on full scale span and offset are
very small and are shown under Operating Characteristics.
Silicone Gel
Die Coat
Wire Bond
Differential/Gauge
Die
P1
Stainless Steel
Metal Cover
Epoxy
Case
Silicone Gel
Die Coat
Wire Bond
Absolute
Die
P1
Stainless Steel
Metal Cover
Epoxy
Case
Lead Frame
Differential/Gauge Element
P2
Bond
Die
Lead Frame
Absolute Element
P2
Die
Bond
Figure 3. Cross Sectional Diagram (not to scale)
Figure 3
illustrates the differential/gauge die in the basic
chip carrier (Case 344). A silicone gel isolates the die surface
and wire bonds from the environment, while allowing the
pressure signal to be transmitted to the silicon diaphragm.
The MPX2202 series pressure sensor operating
characteristics and internal reliability and qualification tests
are based on use of dry air as the pressure media. Media
other than dry air may have adverse effects on sensor
performance and long term reliability. Contact the factory for
information regarding media compatibility in your application.
LINEARITY
Linearity refers to how well a transducer's output follows
the equation: V
out
= V
off
+ sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see
Figure 4)
or
(2) a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user.
Freescale’s specified pressure sensor linearities are based
on the end point straight line method measured at the
midrange pressure.
Least Squares Fit
Exaggerated
Performance
Curve
Least
Square
Deviation
Straight Line
Deviation
Relative Voltage Output
End Point Straight
Line Fit
Offset
0
50
Pressure (% Full Scale)
100
Figure 4. Linearity Specification Comparison
MPX2202
Sensors
Freescale Semiconductor, Inc.
5
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